ওয়েফার ফ্রন্ট-এন্ড মডিউল ৩০০ মিমি

BROOKS ASYST Spartan EFEM Sorter

Brooks Automation Wafer Front-End Module, 300mm, ASYST Spartan EFEM, Sorter

Model: ASYST Spartan EFEM
Type: Sorter
Condition: Used

Technical Data:
100-240V AC
50/60Hz
10A

General:
300-mm EFEM with 3 load ports, cleanroom mini-environment, and integrated wafer transfer robot

This unit is an Equipment Front End Module (EFEM) from the ASYST Spartan series, designed for fully automated handling of 300 mm silicon wafers in semiconductor manufacturing.
It features three load ports, a mini-environment with ULPA air filters, internal lighting, comprehensive safety controls, and all necessary interfaces for seamless integration into production lines.
In addition, it comes with a fully integrated wafer transfer robot that extracts wafers from FOUP/carrier load ports, separates them, and precisely delivers them to downstream process modules.

Ijdpfx Aex I Ax Sjdleik
Year of manufacture: 27.12.2010
Including CD with operating, service, and installation manuals (9701-3060-01 Rev G)

বিজ্ঞাপনটি স্বয়ংক্রিয়ভাবে অনুবাদ করা হয়েছে। অনুবাদে ত্রুটি থাকতে পারে।